| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method of manufacturing a coil part that facilitates processing work and improves yield of products. Ž<P>SOLUTION: The method of manufacturing the coil part includes: a step to mold a slurry into a sheet on a supporting base and form a ceramic green sheet; a step to apply a laser to the supporting base and the ceramic green sheet from the side of the supporting base so as to make through-holes and to fill the through-holes with a conductive material so as to form vias 8a and 8b; and a step to peel the supporting base from the ceramic green sheet and form conductor patterns 2-5 constituting one coil 9 and 10 on the upper and lower surfaces of the ceramic green sheet through the vias 8a and 8b. In the step for forming the ceramic green sheet, the thickness of the supporting base is made 1.0-2.0 times that of the ceramic green sheet. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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