<p>A laser processing system and method. The system comprises a laser source; an imaging device for capturing positional information of a workpiece under processing for controlling a scanning mechanism for directing a laser beam from the laser source onto the workpiece; and the scanning mechanism for directing the laser beam from the laser source to the workpiece along a laser path based on the positional information feedbacked from the imaging device; wherein an optical path of light captured by the imaging device comprises the laser path.</p>
申请公布号
WO2010005394(A1)
申请公布日期
2010.01.14
申请号
WO2008SG00249
申请日期
2008.07.11
申请人
AEM SINGAPORE PTE LTD;CHENG, CHEE YUEN;LAW, CHI KIN DENIS;MA, BO;MUTHUVEL, PARTHASARATHY;WAN, QIU;WEI, JIAN DONG
发明人
CHENG, CHEE YUEN;LAW, CHI KIN DENIS;MA, BO;MUTHUVEL, PARTHASARATHY;WAN, QIU;WEI, JIAN DONG