INK-JET RECORDING HEAD, INK-JET RECORDER, AND MANUFACTURING METHOD OF INK-JET RECORDING HEAD

摘要

PROBLEM TO BE SOLVED: To provide an ink-jet recording head, an ink-jet recorder and the manufacturing method of the ink-jet recording head which enable the miniaturization and cost reduction of the recording head to be progressed further.

SOLUTION: An ink-jet recording head is equipped with: a conduit formation substrate 1; a pressure generation chamber 3 formed in the surface of the conduit formation substrate 1; a nozzle opening part 5 which is formed in the conduit formation substrate 1 and communicates with the pressure generation chamber 3; an oscillating diaphragm 7 which is formed in the surface side of the conduit formation substrate 1 and covers the pressure generation chamber 3; a piezoelectric element 10 formed in the area opposite to the pressure generation chamber 3 across the oscillating diaphragm 7; a driver circuit 9 formed in the area which is the surface of the conduit formation substrate 1 and is located in a line with the pressure generation chamber 3; and a wiring layer 25 which is formed in the surface side of the conduit formation substrate 1 and connects the piezoelectric element 10 to the driver circuit 9.

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