| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a thermal flow sensor free from degradation of flow rate detection accuracy and connection reliability. <P>SOLUTION: The thermal flow sensor includes a sensor chip, having a pad electrically connected to a flow rate detecting section; a circuit chip to be electrically connected to the sensor chip, leads to be electrically connected to the circuit chip; a support member onto which the circuit chip is mounted; wiring electrically connecting the circuit chip and the sensor chip; an insulation member coating the wiring, excluding a connecting part and part of the surface of the circuit chip including a pad forming area thereof; a conductive tape having an adhesive layer formed on the surface the insulation member facing the circuit chip and the sensor chip; and a molded member formed by injection molding, connecting the support member and the lead and coating parts, excluding a connecting part between the lead and the circuit chip and a contact part of the circuit chip with the conductive tape, with the adhesive layer of the conductive tape separated from the molded member. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
