发明名称 |
ACTUATOR AND CONTROL METHOD |
摘要 |
<P>PROBLEM TO BE SOLVED: To prevent the controllability of a servo valve from lowering owing to the nonlinear characteristics. Ž<P>SOLUTION: An actuator comprises: a hollow cylinder; a piston stored in the cylinder, and moving relatively to the cylinder while forming a pair of pressure chambers together with the cylinder; a pair of control valves for making each of a pair of the pressure chambers communicate or shut off relative to pressure source of working fluid or a discharge section; a position detector for detecting the position of the piston with respect to the cylinder; an exhaust valve for discharging the working fluid from at least one of a pair of pressure chambers; and a control section for controlling the control valves so that the position detected by the position detector approaches a predetermined target position. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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申请公布号 |
JP2010007704(A) |
申请公布日期 |
2010.01.14 |
申请号 |
JP20080164982 |
申请日期 |
2008.06.24 |
申请人 |
NIKON CORP |
发明人 |
TANAKA TOSHIHISA;SANADA SATORU;NAKAHIRA NORIO |
分类号 |
F15B9/09;F15B11/06;G05D3/00;G05D3/12 |
主分类号 |
F15B9/09 |
代理机构 |
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代理人 |
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地址 |
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