SEMICONDUCTOR PHYSICAL QUANTITY SENSOR

摘要

<P>PROBLEM TO BE SOLVED: To provide a semiconductor physical quantity sensor capable of preventing a movable electrode from sticking to a fixed electrode. Ž<P>SOLUTION: A protrusion 13 is formed on a proper position on the surface of the movable electrode by performing two-stage etching of a silicon substrate 2. A facing area between the silicon substrate 2 and an insulating layer 20 can be reduced by this constitution, so that the silicon substrate 2 can be prevented from sticking to the insulating layer 20 when anodically bonding the silicon substrate 2 with the insulating layer 20. A metal film 14 is formed on a position facing to the protrusion 13 on the under surface 20b of the insulating layer 20. The metal film 14 performs a role of buffer between the silicon substrate 2 and the insulating layer 20 by this constitution, thereby the silicon substrate 2 can be reliably prevented from sticking to the insulating layer 20 when anodically bonding the silicon substrate 2 with the insulating layer 20. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž