发明名称 SURFACE INSPECTING METHOD AND DEVICE
摘要 A light source section outputs optical flux having two types of wavelength, which are a short wavelength and a long wavelength, while the intensity is made variable. The optical flux is made incident to a detected surface of a body to be detected at a predetermined incident angle simultaneously or alternatively. Based on a type of optical flux outputted from the light source section and an output from a first light intensity detecting section, at least the intensity of the optical flux having a long wavelength outputted from the light source section is adjusted. The output from the first light intensity detecting section in irradiating the optical flux having a short wavelength is compared with the output from the first light intensity detecting section in irradiating the optical flux having a long wavelength. A signal that appears only in the output from the first light intensity detecting section in irradiating the optical flux having a long wavelength is identified as a detected signal from an internal subject. The intensity of optical flux having a long wavelength is adjusted. A disappearance level near a point where the detected signal from the internal subject disappears is calculated. The first intensity of optical flux having a long wavelength is set to level higher than the disappearance level. Based on the output from the first light intensity detecting section obtained by the optical flux having a long wavelength of the first intensity, a subject inside the body to be detected is measured.
申请公布号 US2010007872(A1) 申请公布日期 2010.01.14
申请号 US20070442879 申请日期 2007.12.04
申请人 KABUSHIKI KAISHA TOPCON 发明人 ISOZAKI HISASHI;TAKASE TAKEHIRO;KAKINUMA TAKASHI;MAEKAWA HIROYUKI;KODA FUMIO;YAMAZAKI MICHIHIRO
分类号 G01N21/956;G01J3/00;G01N21/00;H01L21/66 主分类号 G01N21/956
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