| 摘要 |
<P>PROBLEM TO BE SOLVED: To reduce an idle time of a stepper without making excessive a capability of a coater or a developer. Ž<P>SOLUTION: A substrate is conveyed among a coater, a stepper and a developer. A first conveyance device is provided for conveying the substrate into the coater and conveying the substrate out of the developer, and a first load port is provided for exchanging the substrate between the coater/developer and the first conveyance device. Furthermore, a second conveyance device is provided for conveying the substrate between the coater and the stepper and between the stepper and the developer, and a second load port is provided for causing each of the coater, the stepper and the developer to exchange the substrate with the second conveyance device. The substrate can be conveyed in and conveyed out as required by the stepper. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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