| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a magnetic sheet used for an RFID or for suppressing an electromagnetic wave, the magnetic sheet being configured by sputtering a high-resistance soft magnetic film (Fe-M-O) on a substrate, and to provide a method of manufacturing the same. <P>SOLUTION: A magnetic sheet 4 is interposed in between an RFID tag 2 and a metallic member 3. The magnetic sheet 4 includes A-M-O elements in a resin sheet. The element A represents Fe or Co or their mixture; and the element M is at least either one of Hf, Ti, Zr, V, Nb, Ta, Mo, W, Al, Mg, Zn and Ca. Further, the magnetic sheet 4 is composed by sputtering the high-resistance soft magnetic film constituted by the membrane structure of an amorphous phase containing the compound of the elements M and O, and a fine-crystal phase with an average particle crystal size of ≤30 nm, mainly formed of one or two elements selected from Fe or Co dotted in the amorphous phase. This improves effectively the RFID characteristic and contributes to a thin-film structure. A thermal process is not required for the Fe-M-O film. <P>COPYRIGHT: (C)2010,JPO&INPIT |
