| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an immersion aligner for detecting a watermark sticking to a light receiving means mounted on a substrate stage. <P>SOLUTION: The aligner includes an illuminating optical system which illuminates an original plate on which a circuit pattern is formed using exposure light emitted from a light source, a projection optical system for projecting the circuit pattern of the original plate onto a substrate, and a substrate stage for holding the substrate. It makes exposure on the substrate through the projection optical system and an immersion medium, and includes a light-receiving means which is mounted on the substrate stage and receives exposure light, and a measuring means which measures the position of the substrate under the projection optical system. The measuring means measures the position of a light-receiving surface of the light-receiving means that contacts the immersion medium to detect a substance sticking to the light-receiving means. <P>COPYRIGHT: (C)2010,JPO&INPIT |
