| 摘要 |
PROBLEM TO BE SOLVED: To provide an electron beam irradiation equipment improving the corrosion-resistance of a window frame. SOLUTION: In a section of the window frame 34 exposed to an irradiation atmosphere in an irradiation chamber, specifically an outer peripheral section located outside a section which contacts a first O ring 38 so that it seals the irradiation atmosphere and a section which contacts a second O ring 39 so that it seals the irradiation atmosphere, a sprayed coating 40 is formed by a spraying method as shown in Fig.4. Since the irradiation atmosphere does not enter inside the sections which contact the O rings 38 and 39 so that they seal the irradiation atmosphere, the section of the window frame located inside them is not corroded. Therefore, no sprayed coating is formed in the section of the window frame located inside the sections. COPYRIGHT: (C)2010,JPO&INPIT |
