THIN FILM TRANSISTOR, AND METHOD OF MANUFACTURING THIN FILM TRANSISTOR

摘要

PROBLEM TO BE SOLVED: To provide a novel method capable of manufacturing a thin film transistor having as an active layer an oxide semiconductor layer formed by a simple technique of uniform heating. SOLUTION: The method of manufacturing a thin film transistor forms an oxide semiconductor thin film 6 by patterning and then heating a precursor thin film 6' formed by the application of a precursor solution. COPYRIGHT: (C)2010,JPO&INPIT