| 摘要 |
PROBLEM TO BE SOLVED: To measure continuously a humidity having high reliability, and to heighten accuracy of a measured value without shortening a lifetime. SOLUTION: Assuming that a heating period is T, and a heating time is t, each heating cleaning of the first humidity sensor and the second humidity sensor is performed by shifting mutual heating periods T as much as a half period. When performing the heating cleaning of the first humidity sensor (for example, t5 point), the first humidity sensor subjected to the heating cleaning at this time is treated as a measuring sensor, and the second humidity sensor not subjected to the heating cleaning is treated as a non-measuring sensor, and a measured value HR of the humidity to be used is switched from a measured value HR2 of the humidity from the non-measuring sensor to a measured value HR1 of the humidity from the measuring sensor. When performing the heating cleaning of the second humidity sensor, a measured value is switched similarly. COPYRIGHT: (C)2010,JPO&INPIT
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