| 摘要 |
PROBLEM TO BE SOLVED: To dispense with a flexible hose for connecting an arm to a suction mechanism, and to elongate a lifetime of a cleaning unit. SOLUTION: An analyzer is configured such that an arm side suction port 51B provided on the arm 51 is communicated with a body side suction port 102A provided on the analyzer body side, on a cleaning position Q where an upper electrode cleaning body 511 cleans an upper electrode 3. COPYRIGHT: (C)2010,JPO&INPIT
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