摘要 |
<p><P>PROBLEM TO BE SOLVED: To improve productivity of an optical waveguide device having a groove for cutting only one of the two optical waveguides formed in parallel on a substrate, with a comparatively simple structure and step. <P>SOLUTION: The optical waveguide device is provided with a groove for cutting only one of the two optical waveguides formed in parallel on the upper face of a substrate, wherein the groove penetrates from the upper face to the bottom face of the substrate. Such groove is formed by fixing one side face of the substrate 1 on a support base 4 so that, of the two optical waveguides 2, 3 formed in parallel on the upper face of the substrate 1, one optical waveguide 2 to be cut off may be situated on the upper side while the other optical waveguide 3 not to be cut off may be situated on the lower side, and by advancing a dicing blade 5 from the bottom face side to the upper face side of the substrate 1. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |