IMPRINTING STAMPER AND IMPRINTING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a durable stamper and a transfer method that can reduce a defective area of pattern transfer following local protrusions of a substrate to be transferred.

SOLUTION: This imprinting stamper 101 formed with rugged shape on the surface includes a resin pattern layer 102 formed with the rugged shape; a resin buffer layer 103 arranged on the back face of the pattern layer 102; and a base material layer 104 arranged on the back face of the buffer layer 103. The Young's modulus of the buffer layer 103 is smaller than that of the pattern layer 102, and the Young's modulus of the base material layer 104 is larger than that of the buffer layer 103.

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