| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a MEMS (Micro Electric Mechanical System) vibrator which can easily be processed, can reduce power consumption and can more easily adjust its resonance frequency than heretofore. Ž<P>SOLUTION: The MEMS vibrator includes: a vibrator 121 which is fixed on a substrate 111 at one or more points and with which one or more comb-like projection groups are formed on its surface; one or more electrostatic electrodes 161, 162, 163, 164, with which comb-like projection groups are formed on their surfaces, constituting a comb-like capacitor with the comb-like projection groups of the vibrator 121; a driving electrode 141; and a detection electrode 151. In the MEMS vibrator, a DC voltage is applied to the comb-like capacitor, thereby changing the frequency of vibration of the vibrator 121. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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