发明名称 |
Electrochemical Fabrication Method for Producing Compliant Beam-Like Structures |
摘要 |
Embodiments of the invention are directed to the formation of beam-like structures using electrochemical fabrication techniques where the beam like structures have narrow regions and wider regions such that a beam of desired compliance is obtained. In some embodiments, narrower regions of the beam are thinner than a minimum feature size but are formable as a result of the thicker regions. In some embodiments the beam-like structures are formed from a plurality of adhered layers. |
申请公布号 |
US2010006443(A1) |
申请公布日期 |
2010.01.14 |
申请号 |
US20090504496 |
申请日期 |
2009.07.16 |
申请人 |
MICROFABRICA INC. |
发明人 |
COHEN ADAM L.;LOCKARD MICHAEL S.;BANG CHRISTOPHER A.;KILGO, III MARVIN M. |
分类号 |
C25D5/02;B23H3/00;B23H9/00;C25D1/00;C25D5/10;C25D7/00;G03F7/00;G03F9/00 |
主分类号 |
C25D5/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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