Methods for cleaning substrate surfaces after etch operations,申请号EP20000310491-传众专利搜索

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发明名称	Methods for cleaning substrate surfaces after etch operations
摘要
申请公布号	EP1107301(B1)	申请公布日期	2010.01.13
申请号	EP20000310491	申请日期	2000.11.27
申请人	LAM RESEARCH CORPORATION	发明人	FARBER, JEFFREY J.;TREICHEL, HELMUTH W.;RADMAN, ALLAN M.
分类号	B08B1/04;H01L21/306;B08B3/04;B08B3/08;B08B7/04;H01L21/302;H01L21/304;H01L21/3065	主分类号	B08B1/04
代理机构		代理人
主权项
地址

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