Production method of a multilayer ceramic substrate

摘要

A multilayer ceramic substrate having a cavity is formed by the steps of laminating a plurality of ceramic green sheets (61-69) including ceramic green sheets (63-69) having through holes corresponding to the cavity (11) to form a multilayer body, pressing the multilayer body and firing the pressed body. At this time, shrinkage suppression green sheets (72,73) are laminated on the surfaces of the ceramic green sheets constituting the outermost layers of the multilayer body, and a shrinkage suppression green sheet piece (70a) is disposed on the ceramic green sheet exposed to the bottom of the cavity in accordance with the shape of the cavity A burnable sheet piece (71a) is further disposed on the shrinkage suppression green sheet piece. Before the pressing step, an embedded green sheet (74) separate from the ceramic green sheets (portion separated by inserting a cut) is disposed on the shrinkage suppression green sheet piece or the burnable sheet piece so that it is filled in the cavity. After the firing step, the embedded green sheet fired (75) is removed.