发明名称 STICTION MITIGATION WITH INTEGRATED MECH MICRO-CANTILEVERS THROUGH VERTICAL STRESS GRADIENT CONTROL
摘要 <p>The present disclosure relates to the mitigation of stiction in electromechanical devices. In some embodiments, an electromechanical device may be provided with one or more restoration portions that provide an assisting mechanical force for mitigating stiction. The restoration portions may be implemented as one or more deflectable elements, where the deflectable elements may have various configurations or shapes, such as a chevron, cross, and the like. For example, the restoration portion can be a cantilever that deflects when at least one component comes into contact or proximity with another component. Multiple restoration portions also may be employed and placed strategically within the electromechanical device to maximize their effectiveness in mitigating stiction.</p>
申请公布号 WO2010006213(A1) 申请公布日期 2010.01.14
申请号 WO2009US50172 申请日期 2009.07.09
申请人 QUALCOMM MEMS TECHNOLOGIES, INC.;TUNG, YEH-JIUN 发明人 TUNG, YEH-JIUN
分类号 G02B26/00;B81B3/00;G02B26/08 主分类号 G02B26/00
代理机构 代理人
主权项
地址