| 摘要 |
PURPOSE: A substrate storage container, a mask blank receiving body, and a transfer mask receiving body are provided to prevent interference of a film formed on the surface of a substrate by measuring a cross-sectional shape of a groove. CONSTITUTION: A container main body has a retaining groove(43,45) maintaining the outer circumference of a glass substrate in which a film is attached. The retaining groove has a groove bottom surface(43a,45a), and a first and a second groove side surfaces(43b,43c)(45b,45c). The groove bottom surface is contacted with the outer circumference of the glass substrate. An angle of an edge of the first groove side surface and the groove bottom surface is bigger than the angle of the outer circumference end and a corner cutting surface.
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