| 摘要 |
PURPOSE: A purge device is provided to avoid the contamination of a container such as a reticle by preventing the flow of a particle attached on a nozzle into a container. CONSTITUTION: A nozzle(110) is connected to a container(200) in order to supply gas. A detection unit(111) detects the connection state of a nozzle and the container. The detection unit is connected to the container and the nozzle and flows the gas of the first flow rate to the nozzle. The detection unit comprises a flow control unit(119). A flow control unit in disconnection to the container and the nozzle, and flows the gas of the second flow rate lower than the first flow rate. The flow control unit comprises a switching valve and a switching valve controller.
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