LOW-ACTIVATION ENERGY SILICON-CONTAINING RESIST SYSTEM,申请号EP20040796270-传众专利搜索

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发明名称	LOW-ACTIVATION ENERGY SILICON-CONTAINING RESIST SYSTEM
摘要
申请公布号	EP1678556(A4)	申请公布日期	2010.01.13
申请号	EP20040796270	申请日期	2004.10.22
申请人	INTERNATIONAL BUSINESS MACHINES CORPORATION	发明人	HUANG, WU-SONG;ALLEN, ROBERT, D.;ANGELOPOULOS, MARIE;KWONG, RANEE, W.;SOORIYAKUMARAN, RATNAM
分类号	G03C1/76;G03F;G03F7/004;G03F7/075	主分类号	G03C1/76
代理机构		代理人
主权项
地址

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