RF MEMS switch

摘要

An RF MEMS switch having a beam (115) composed of a material having a high resistivity and a large Young's modulus may provide a large restoring force, a large electrostatic force at a low actuation voltage, and good isolation between signal input and output. RF MEMS switch reliability may be improved by reducing failures due to stiction by providing a large restoring force. A reliable contact may be provided with a large electrostatic force.