SURFACE MORPHOLOGY SENSOR AND METHOD FOR MANUFACTURE THEREOF

摘要

[PROBLEMS] To provide a surface morphology sensor which has an improved sensitivity while retaining high mechanical strength, and to provide a method for the manufacture of the surface morphology sensor. [MEANS FOR SOLVING PROBLEMS] A surface morphology sensor comprising: a semiconductor substrate (10); an interlayer insulating film (40) which is provided on the upper side of the semiconductor substrate (10) and has a smooth upper surface; a detection electrode film (42a) which is formed on the interlayer insulating film (40); an upper insulating film (110) which is formed on the detection electrode film (42a) and the interlayer insulatingfilm (40) and has a silicon nitride film exposed at the surface; and a protective insulating film (54) which is deposited on the upper insulating film (110) and comprises a tetrahedral amorphous carbon (ta-C) film having a window (54a) formed on the detection electrode film (42a).