TEST DEVICE FOR SEMICONDUCTOR DEVICE

摘要

A test device (10) for a semiconductor device for use in testing semiconductor elements formed on a semiconductor substrate comprises a first substrate (11) having openings (12), frame bodies (20) each of which is provided in each of the openings (12) and in each of which probes (13) are disposed, and second substrates (14) each of which is provided around each of the openings (12) and vertically to the first substrate (11) and connected to the first substrate (11). The test device is characterized in that the probes (13) are extended through each of the frame bodies (20), and further extended from the periphery of each of the frame bodies (20) through each of the openings (12) so as to be connected to each of the second substrates (14).