发明名称 |
DISCHARGE LAMP, CABLE FOR CONNECTION, LIGHT SOURCE DEVICE, AND EXPOSURE DEVICE |
摘要 |
A light source device having a large cooling action on the base member of a discharge lamp. A connector (41) on the sides of the power supply (32) and the air blower (34) and the base-side connector (52) of a discharge lamp (1) are connected to each other through a connection cable (57) having a power cable (33A) in which an air blow pipe (35A) is contained. An electric power is supplied from the power supply (32) to a base part (28) through the power cable (33A) of the connection cable (57), the base-side connector (52) and a flow passage bending member (51). The cool air from the air blower (34) is supplied to the groove part (28b) of the base part (28) through the air blow pipe (35A) of the connection cable (57), the base-side connector (52) and an air blow passage in the flow passage-bending member (51). |
申请公布号 |
EP2143995(A1) |
申请公布日期 |
2010.01.13 |
申请号 |
EP20080739826 |
申请日期 |
2008.04.03 |
申请人 |
NIKON CORPORATION |
发明人 |
KIKUCHI, TAKAYUKI;KITANO, HIROSHI |
分类号 |
F21V29/00;F21Y101/00;H01J5/50;H01J61/52;H01L21/027 |
主分类号 |
F21V29/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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