发明名称 |
Method of fabricating heteroepitaxial microstructures |
摘要 |
An efficient method of fabricating a high-quality heteroepitaxial microstructure having a smooth surface. The method includes detaching a layer from a base structure to provide a carrier substrate having a detached surface, and then forming a heteroepitaxial microstructure on the detached surface of the carrier substrate by depositing an epitaxial layer on the detached surface of a carrier substrate. Also included is a heteroepitaxial microstructure fabricated from such method.
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申请公布号 |
US7646038(B2) |
申请公布日期 |
2010.01.12 |
申请号 |
US20070852562 |
申请日期 |
2007.09.10 |
申请人 |
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发明人 |
FAURE BRUCE;LETERTRE FABRICE;GHYSELEN BRUNO |
分类号 |
H01L31/072;H01L21/762;H01L21/8234;H01L31/0328;H01L31/0336;H01L31/109 |
主分类号 |
H01L31/072 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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