发明名称 |
ELECTROSTATIC LEVITATION FURNACE |
摘要 |
An electrostatic levitation furnace is improved by providing three pairs of electrodes opposed to each other respectively on three axes perpendicularly intercepting each other at a position where the sample is to be levitated in the vacuum chamber, and disposing a plurality of access ports, which are directed to the position of the sample, to the vacuum chamber tree-dimensionally, whereby the accessible direction against the sample is diversified, it becomes possible to improve the degree of freedom in distribution of various apparatuses and easily cope with increase of apparatuses.
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申请公布号 |
CA2462125(C) |
申请公布日期 |
2010.01.12 |
申请号 |
CA20022462125 |
申请日期 |
2002.09.27 |
申请人 |
IHI AEROSPACE CO., LTD. |
发明人 |
KAWASAKI, KAZUNORI;MURAMATSU, SHOJI;TAKADA, TETSUYA;ASAHI, HIROAKI |
分类号 |
F27B17/00;F27B17/02;F27D7/06;F27D11/00;F27D19/00;F27D21/02;H05B6/32 |
主分类号 |
F27B17/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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