发明名称 Array of non-volatile memory cells with floating gates formed of spacers in substrate trenches
摘要 In order to reduce the integrated circuit area that is occupied by an array of a given number of flash memory cells, floating gate charge storage elements are positioned along sidewalls of substrate trenches, preferably being formed of doped polysilicon spacers. An array of dual floating gate memory cells includes cells with this structure, as an example. A NAND array of memory cells is another example of an application of this cell structure. The memory cell and array structures have wide application to various specific NOR and NAND memory cell array architectures.
申请公布号 US7646054(B2) 申请公布日期 2010.01.12
申请号 US20060533313 申请日期 2006.09.19
申请人 SANDISK CORPORATION 发明人 MOKHLESI NIMA
分类号 H01L29/788 主分类号 H01L29/788
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