发明名称 INCLINATION ANGLE ADJUSTING DEVICE AND WORKPIECE ATTACHING DEVICE
摘要 PURPOSE: An inclination angle adjusting device, and a workpiece installing device are provided to secure the precision degree, the strong property. CONSTITUTION: An inclination angle adjusting device, and a workpiece installing device comprise a support body(7) and a driving body(24). The support body comprises inclination angle adjusting planes(8,9). The driving body comprises an inclination angle adjusting plane contacted with the inclination angle adjusting plane of the support body, an adjusting object which is not parallel with the inclination angle adjusting plane, and a coupling unit which couples the support body and the driving body.
申请公布号 KR20100004063(A) 申请公布日期 2010.01.12
申请号 KR20090059865 申请日期 2009.07.01
申请人 KOYO MACHINE INDUSTRIES CO., LTD. 发明人 HIRAYAMA HARUYUKI;YAMADA HIROHISA;NAKANISHI YOSHINORI;OKAMOTO TOMOHIRO
分类号 B24B37/04;B24B7/22;B24B41/06;H01L21/304 主分类号 B24B37/04
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