发明名称 Method for producing an integrated circuit having semiconductor zones with a steep doping profile
摘要 An integrated circuit and method, producing semiconductor zones with a steep doping profile is disclosed. In one embodiment, dopants are implanted in a region corresponding to the semiconductor zone to be formed and which has at least one topology process. During the subsequent laser irradiation for activating the dopants in the semiconductor zone, regions which are laterally directly adjacent to the semiconductor zone are protected against melting on account of the topology process.
申请公布号 US7645690(B2) 申请公布日期 2010.01.12
申请号 US20070675376 申请日期 2007.02.15
申请人 INFINEON TECHNOLOGIES AUSTRIA AG 发明人 ZUNDEL MARKUS;SCHULZE HANS-JOACHIM;HILLE FRANK
分类号 H01L21/425 主分类号 H01L21/425
代理机构 代理人
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