| 摘要 |
<p>PURPOSE: A method for manufacturing a transparent conductive oxide electrode with high transmittance is provided to improve light transmittance of a transparent electrode by regularly and uniformly forming a pattern of a nano scale on a surface of the transparent conductive oxide electrode. CONSTITUTION: A sol layer(20) is prepared by forming the mixture of a sol state including a transparent conductive oxide material on a substrate(10). A polymer mold(30) made of the material absorbing the solvent of the mixture is arranged on the sol layer. A pressure chamber(40) is divided into the pressure part and the vacuum part by a flexible layer(410). The substrate with the polymer mold is mounted on the vacuum unit of the pressure chamber. A transparent conductive oxide gel pattern is formed on the substrate by imprinting the sol layer at a temperature of 100 to 200 degrees centigrade with 1 to 10 atm pressure. The transparent conductive oxide gel pattern is annealed. The mixture of the sol state with the transparent conductive oxide includes ITO(Indium Tin Oxide), AZO(Al doped ZnO), GZO(Gallium doped ZnO) or SnO2.</p> |
