APPARATUSES AND METHODS USING MEASUREMENT OF A FLARE GENERATED IN AN OPTICAL SYSTEM

摘要

PURPOSE: A device and a method using measurement of a flare generated in an optical system are provided to obtain the flare in an optical system to be inspected by calculating a pupil wavefront aberration with high space resolution and a pupil function including both sides of the pupil transmissivity distribution. CONSTITUTION: A first wavefront aberration of an optical system to be inspected is measured in a first measurement surface(S302). A second wavefront aberration of the optical system to be inspected is measured in a second measurement surface. The pupil transmissivity distribution of the optical system is measured(S304). A pupil function of the optical system is determined based on the measured pupil transmissivity distribution and wavefront aberration(S306). The light intensity distribution formed on an upper side of the optical system is calculated by the imaging calculation using the determined pupil function. The flare is produced from the light intensity distribution(S308).