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发明名称
METHOD OF PURIFYING ORGANOSILICON COMPOSITIONS USED AS PRECURSORS IN CHEMICAL VAPOR DEPOSITION
摘要
申请公布号
KR100936109(B1)
申请公布日期
2010.01.11
申请号
KR20080011517
申请日期
2008.02.05
申请人
发明人
分类号
C07F7/18
主分类号
C07F7/18
代理机构
代理人
主权项
地址
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