FOCUSED ION BEAM APPARATUS USING OPENING FEATURE AND MACHINING METHOD USING THEREOF

摘要

PURPOSE: A collection ion beam machining apparatus using a shaped opening and a machining method using the same are provided to rapidly machine the specific shape by applying the specific shape to an energy beam. CONSTITUTION: A connecting ion beam machining apparatus using a shaped opening comprises an ion source unit(10), a shape opening section(20), and an ion beam collection unit(30). The shaped opening comprises a through hole(21) with the specified shape. The specific shape is applied to the ion beam formed in the ion source section by the through hole. The shaped opening is installed in the way that the ion beam passes. The ion beam collection unit collects the ion beam so that the ion beam passing the shaped opening keeps the specific shape and is reached to the machining surface of the object to be machined. Gas like argon gas, hydrogen gas, and helium gas is used in the ion source unit.