PERIPHERALLY ENGAGING ELECTRODE CARRIERS AND ASSEMBLIES INCORPORATING THE SAME
摘要
In accordance with one embodiment of the present disclosure, an assembly is provided comprising a multi-component electrode and a peripherally engaging electrode carrier. The peripherally engaging electrode carrier comprises a carrier frame and a plurality of reciprocating electrode supports. The multi-component electrode is positioned in the electrode accommodating aperture of the carrier frame. The backing plate of the electrode comprises a plurality of mounting recesses formed about its periphery. The reciprocating electrode supports can be reciprocated into and out of the mounting recesses. Additional embodiments of broader and narrower scope are contemplated.
申请公布号
WO2010002724(A2)
申请公布日期
2010.01.07
申请号
WO2009US48797
申请日期
2009.06.26
申请人
LAM RESEARCH CORPORATION;AUGUSTINO, JASON;AVOYAN, ARMEN;FANG, YAN;OUTKA, DUANE;SHIH, HONG;WHITTEN, STEPHEN
发明人
AUGUSTINO, JASON;AVOYAN, ARMEN;FANG, YAN;OUTKA, DUANE;SHIH, HONG;WHITTEN, STEPHEN