| 摘要 |
PURPOSE: A method for generating secure key using certificateless public key is provided to secure the processing quality in the regular discharge processing start point for incensement of processing area. CONSTITUTION: The processing target which is to derivative' is installed in the first metal surface of the first the first stage unit(21). The solid dielectric layer(25) is installed on the second metal(24) of the second stage unit(22). The edge of workpiece is installed in the inner side of the solid dielectric layer. |
