A SULFURIC ACID ELECTROLYTIC CELL AND A SULFURIC ACID RECYCLE TYPE CLEANING SYSTEM APPLYING THE SULFURIC ACID ELECTROLYTIC CELL

摘要

PURPOSE: A sulfuric acid electrolytic bath and a sulfuric acid recycle type cleaning system using the same are provided to fix the anode and cathode by an auxiliary gasket by installing an auxiliary gasket on the outer edge of an electric supplier bigger than anode and cathode. CONSTITUTION: A sulfuric acid recycle type cleaning system comprises a sulfuric acid electrolytic bath(1) and a cleaning bath. The concentrated sulfuric acid and the ultrapure water are supplied to an anode liquid tank(6). The concentrated sulfuric acid and the ultrapure water are controlled in the anode liquid tank at the wanted concentration. The concentrated sulfuric acid and the ultrapure water are supplied to an anode chamber(4) of the sulfuric acid electrolytic bath. An anode liquid supply line(9) is connected to the anode chamber. A cathode liquid supply line(16) is connected to a cathode chamber(12). The cathode liquid is circulated in between the cathode chamber and a cathode liquid tank(14) by a cathode liquid circulation pump(13).