| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To solve the problem that it is needed to measure flare point heights for preventing reduction of yield due to fluctuation of flare point heights of a main magnetic pole in manufacture of a perpendicular magnetic recording head. <P>SOLUTION: In a head slider manufacturing process, estimation of the flare point height of the main magnetic pole 36 is performed by the following procedures. (1) Magnetic field intensity is measured by using a magnetic field sensor and the point at which the magnetic field is the maximum is determined as the center point of the main magnetic pole. (2) A measuring point is moved along a direction Z from the center point and positioning is performed so that the measured value of the magnetic field is a reference value. (3) The measuring point is transferred by±nearly several 10 nm in the direction Z as the center position in which the positioning is performed and an attenuation factor (changing ratio) of the measured values of the magnetic intensity to displacement in the direction Z of the measuring point is calculated and normalized with the measured value, and plotted to measured values themselves. Comparison with a data base of a sample which is separately prepared and whose flare point height is known is performed and the flare point height of the sample is estimated from the normalized value of the changing ratio. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
