| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate storing container that properly seals the inside of a container body and prevents gas containing contamination from flowing into the container body, thereby, reduces the possibilities of causing trouble for the opening and closing of a lid. SOLUTION: The substrate storing container includes: a container body which stores a semiconductor wafer W; a lid 50 which opens and closes an opened front rim flange 26 of the container body 1; and a deformable gasket which intervenes between the opened rim flanges 26 of the container body 1 and the lids 50. The gasket is formed of: a gasket 28 which is fit into the inner periphery of the rim flange 26 of the container body 1 to be in close contact with the peripheral wall of the lid 50; and a gasket 64 which is fit into the lid 50 to be in close contact with the inner periphery of the rim flange 26 of the container body 1. Double seal structure is made by equipping with lip type gaskets 28 and 64, thereby the inside of the container body 1 can be sealed properly and securely, and, when the lid 50 is fit, there is no risk of increasing resistance and causing trouble for opening and closing. COPYRIGHT: (C)2010,JPO&INPIT |
