摘要 |
Provided is an acceleration sensor that has high detection sensitivity and that can enhance production efficiency. The acceleration sensor (50) has: a ceramic substrate (1) made of Al2O3; a ferroelectric layer (2) formed in a predetermined area on the ceramic substrate (1) by screen printing, the ferroelectric layer (2) being made of BaTiO3; a proof mass (4) disposed so as to face the ferroelectric layer (2), the proof mass (4) being formed at a predetermined distance d from the ferroelectric layer (2); and a first electrode (7) and a second electrode (8) that are formed on that side of the proof mass (4) which faces the ferroelectric layer (2), so as to be fixed thereto. The first electrode (7) and the second electrode (8) are each formed in the shape of comb teeth, and comb tooth portions (7a) and (8a) thereof are arranged in an alternating manner.
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