METHOD OF REGENERATING COOLANT AND METHOD OF REGENERATING SLURRY
摘要
<p>A method of regenerating a coolant is provided with which a regenerated slurry can be inhibited from having an increased viscosity. The method of coolant regeneration comprises subjecting a spent slurry discharged after the cutting of a silicon ingot with a slurry containing abrasive grains and a water-soluble coolant to at least a distillation step to obtain a distilled coolant and obtaining a regenerated coolant therefrom, wherein the distilled coolant comprises at least 5 wt.% water and at least 80 wt.% propylene glycol.</p>
