发明名称 |
INDUCTOR AND METHOD FOR MANUFACTURING THE SAME |
摘要 |
<p>An insulating film (119) is arranged on a semiconductor substrate (1), and an inductor wiring (111) is embedded in the insulating film (119). The inductor wiring (111) is composed of a metal and is spirally formed. The inductor wiring (111) has a U-shaped cross-section.</p> |
申请公布号 |
WO2010001541(A1) |
申请公布日期 |
2010.01.07 |
申请号 |
WO2009JP02809 |
申请日期 |
2009.06.19 |
申请人 |
PANASONIC CORPORATION;IDOTA, KEN;NAKAMURA, ATSUSHI |
发明人 |
IDOTA, KEN;NAKAMURA, ATSUSHI |
分类号 |
H01L21/822;H01F17/00;H01F41/04;H01L27/04 |
主分类号 |
H01L21/822 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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