发明名称 INDUCTOR AND METHOD FOR MANUFACTURING THE SAME
摘要 <p>An insulating film (119) is arranged on a semiconductor substrate (1), and an inductor wiring (111) is embedded in the insulating film (119). The inductor wiring (111) is composed of a metal and is spirally formed. The inductor wiring (111) has a U-shaped cross-section.</p>
申请公布号 WO2010001541(A1) 申请公布日期 2010.01.07
申请号 WO2009JP02809 申请日期 2009.06.19
申请人 PANASONIC CORPORATION;IDOTA, KEN;NAKAMURA, ATSUSHI 发明人 IDOTA, KEN;NAKAMURA, ATSUSHI
分类号 H01L21/822;H01F17/00;H01F41/04;H01L27/04 主分类号 H01L21/822
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