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发明名称
Mikroelektromechanisches Bauteil mit integrierter Abdeckung
摘要
申请公布号
DE602005017858(D1)
申请公布日期
2010.01.07
申请号
DE200560017858T
申请日期
2005.09.26
申请人
STMICROELECTRONICS INC.
发明人
CHIU, ANTHONY M.;SIEGEL, HARRY MICHAEL
分类号
B81B7/00
主分类号
B81B7/00
代理机构
代理人
主权项
地址
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