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发明名称
Method for microfabricating structures using silicon-on-insulator material
摘要
申请公布号
AU2009248425(A1)
申请公布日期
2010.01.07
申请号
AU20090248425
申请日期
2009.12.10
申请人
THE CHARLES STARK DRAPER LABORATORY, INC.
发明人
WILLIAM D. SAWYER;JEFFREY T. BORENSTEIN
分类号
B81C3/00;H01L21/46
主分类号
B81C3/00
代理机构
代理人
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地址
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