| 摘要 |
PROBLEM TO BE SOLVED: To provide an excimer lamp wherein a reflecting film is arranged in a discharge envelope and a light-extracting window is arranged at an end of the discharge envelope. SOLUTION: In the excimer lamp provided with the discharge envelope formed of a dielectric material and formed at a tube-shape closed at one end, the light-extracting window arranged on the other end side of the discharge envelope, discharge gas filled in a discharge space of the discharge envelope, and a pair of electrodes facing the discharge envelope through the discharge space and extending from one end side of the discharge envelope to the other end side, the reflecting film formed of a silica particle as a major component is arranged in the discharge envelope so as to extend along the pair of electrodes, and a flange connected with the light-extracting window is arranged at the other end of the discharge envelope. COPYRIGHT: (C)2010,JPO&INPIT |
