| 摘要 |
<P>PROBLEM TO BE SOLVED: To reduce bonding defects between piezoelectric element members and an FPC at interconnecting parts between adjacent piezoelectric element members in a piezoelectric actuator wherein a plurality of piezoelectric element members formed with a plurality of pillar parts are arranged in a pillar pitch direction. Ž<P>SOLUTION: When one FPC 8 is bonded to piezoelectric element groups 6 wherein the piezoelectric element members 13a-13c are arranged, formed with a plurality of pillar parts 14 formed like in teeth of a comb in a piezoelectric actuator, the interconnecting parts of bonding faces where the piezoelectric element members 13a-13c are bonded to the FPC 8 are made to have smaller or no step differences so as to stably bond the sheet of FPC 8 with the piezoelectric element members 13a-13c. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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