| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical deflector, for ensuring a large deflection angle with minimized power consumption without generating unnecessary resonance even when driven at high frequency. SOLUTION: The optical deflector includes a supporter 103; a movable plate 101 having a mirror face for reflecting light; an elastic member 102 for connecting the movable plate 101 and the supporter 103 and holding the movable plate 101 so that the movable plate 101 deflects; a driving coil 104 formed in a ring form on the movable plate in such a manner that the driving coil passes near a movable end of the movable plate 101 when the movable plate deflection-moves; and a magnet 108 and magnetic yokes 109 and 110 generating a closed magnetic circuit for applying a magnetic field to the driving coil 104 in the direction substantially parallel to the plane of the movable plate 101. The magnet 108 or the magnetic yokes 109 and 110 generating the closed magnetic circuit are arranged at a position opposite to the movable end of the movable plate 101 outside the driving coil 104, and at a position near the movable plate 101 inside the driving coil 104 to form a magnetic gap. COPYRIGHT: (C)2010,JPO&INPIT
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